Surface finishing / Thin film technology

Description

  • Production PE-CVD system with spectrometer f. opt. Emission spectroscopy, energy dispersive mass spectrometer
  • High-end CVD system with diff. pump and newly developed cooling trap
  • E-Beam steaming system
  • RF diode sputtering system
  • Parallel plate reactor for RIE

Laboratory management

Prof. Dr. Katja Beha Room: G 3.49

T +49 89 1265-1617
F +49 89 1265-1603

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Profile

Corresponding

Lab Support

Armin Hadzimujic Room: D 305

T +49 89 1265-3650
F +49 89 1265-1603

E-Mail